Dong-Han Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 29 March 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Overlay metrology, Metrology, Distortion, Control systems, Semiconducting wafers, Scanners, Etching, Information technology, Image processing, Photomasks

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Semiconductors, Lithography, Reticles, Metrology, Scanners, Manufacturing, Control systems, Computer simulations, Time metrology, Semiconductor manufacturing, Semiconducting wafers, HVAC controls, Data corrections, Data integration, Overlay metrology, Content addressable memory

Proceedings Article | 11 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Reticles, Optical lithography, Image segmentation, Scanners, Complex systems, Control systems, Distortion, Double patterning technology, Overlay metrology, Nonlinear control

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