Dr. Dongsung Hong
Principal Engineer at Seagate Technology LLC
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Wafer-level optics, Thin films, Lithography, Optical lithography, Etching, Manufacturing, Head, Nanoimprint lithography, Neodymium, Semiconducting wafers

SPIE Journal Paper | 2 August 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Optical lithography, Head, Thin films, Lithography, Manufacturing, Thin film manufacturing, Etching, Overlay metrology

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Electron beam lithography, Deep ultraviolet, Metals, Photomasks, Optical proximity correction, Error control coding, Semiconducting wafers, Binary data, Laser systems engineering

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Contamination, Air contamination, Glasses, Chemistry, Inspection, Pellicles, Photomasks, Environmental sensing, Binary data

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Cadmium, Deep ultraviolet, Metals, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Vestigial sideband modulation, Back end of line

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top