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Dongxu Yue

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Proceedings Article | 24 August 2009 Paper

Nonlinear dynamics characterization of electrostatically actuated sub-micro beam resonators

Dong-xu Yue, Hong Yu, Wei-min Yuan

Proceedings Volume 7381, 73812O (2009) https://doi.org/10.1117/12.836716

KEYWORDS: Resonators, Sensors, Nonlinear dynamics, Silicon, Microelectromechanical systems, Nonlinear filtering, Microresonators, Fourier transforms, Complex systems, Biology

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Electro-statically actuated sub-micro beam resonators, which can be used as sensors in biology or filters in wireless communications, have gotten significant attention due to their simple geometries, excellent electrical and mechanical characteristics and extensively potential applications. In this paper, we present comprehensive analysis of the nonlinearity in frequency response of sub-micro cantilevers, clamped-clamped and beam resonators which are actuated by electro-static force. The spring hardening effects and softening effects are observed in the experiment. It is found that the nonlinearity is relatively independent of the AC voltage, but is markedly enhanced by increasing of DC voltage. However, the response nonlinearity of the doubly clamped beam shows different feature from that of the cantilever. The reason is also explored in this paper. A nonlinear model is introduced to explain the nonlinearity of the frequency response. This investigation provides us an understanding of the nonlinear dynamic characteristics of sub-micro beam resonators. It is helpful for us to study the sensitivity when the beam is used in a detecting system or used to be a sensor.

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