Dr. Donna M. Lennon
at MIT Lincoln Lab
SPIE Involvement:
Publications (7)

Proceedings Article | 18 February 2009
Proc. SPIE. 7220, Silicon Photonics IV
KEYWORDS: Silicon, Waveguides, Modulators, Diodes, Electronics, Germanium, Photodiodes, Femtosecond phenomena, Optical filters, Mode locking

Proceedings Article | 13 February 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Silicon, Modulators, Waveguides, Optical filters, Diodes, Germanium, Electronics, Photodetectors, Phase shifts, Photodiodes

Proceedings Article | 23 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Semiconducting wafers, Wafer-level optics, Electron beam lithography, Polymethylmethacrylate, Hybrid optics, Photoresist processing, Lithography, Chemically amplified resists, Head-mounted displays, Photoresist materials

Proceedings Article | 14 February 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Silicon, Optical filters, Diodes, Modulators, Waveguides, Electronics, Modulation, Femtosecond phenomena, Resonators, Photodiodes

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Electron beams, Semiconducting wafers, Optical simulations, Mask making, Silicon, Electron beam lithography, 3D modeling, Lithography, Optical proximity correction, Diffusion

Showing 5 of 7 publications
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