Donny de Borst
at cosine measurement systems
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 21 August 2024 Poster + Paper
Proceedings Volume 13093, 130934R (2024) https://doi.org/10.1117/12.3019866
KEYWORDS: Mirrors, X-ray optics, Silicon, Metrology, X-rays, Wafer level optics, Semiconducting wafers, Inspection, Robots, Optical surfaces

Proceedings Article | 21 August 2024 Presentation + Paper
Proceedings Volume 13093, 1309319 (2024) https://doi.org/10.1117/12.3019675
KEYWORDS: Mirrors, X-rays, X-ray optics, Silicon, Semiconducting wafers, Optical benches, Spatial resolution, Optics manufacturing, X-ray telescopes, Robots

Proceedings Article | 5 October 2023 Presentation + Paper
Proceedings Volume 12679, 1267903 (2023) https://doi.org/10.1117/12.2678106
KEYWORDS: Mirrors, Silicon, X-ray optics, Semiconducting wafers, Wafer-level optics, X-rays, Synchrotron radiation, Ion beam finishing, Mirror surfaces, Laser cutting

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