Dr. Doo-Hyun Cho
at Samsung Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Hyperspectral imaging, Metrology, Optical sensors, Principal component analysis, Data modeling, Optical testing, Sensor fusion, Semiconducting wafers, Instrument modeling, RGB color model

Proceedings Article | 21 August 2020 Presentation + Paper
Proc. SPIE. 11500, ODS 2020: Industrial Optical Devices and Systems
KEYWORDS: Metrology, Visual process modeling, Data modeling, Sensors, Image processing, Semiconducting wafers, RGB color model, Chemical mechanical planarization, General packet radio service

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