Dr. Dorothee Hüser-Espig Profile

Dr. Dorothee Hüser-Espig

at Univ der Bundeswehr Hamburg

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 20 May 2022 Paper

Development of a sinusoidal pseudochirp material measure for the characterization of optical surface topography measuring instruments

Andre Felgner, Sai Gao, Dorothee Hueser, Uwe Brand

Proceedings Volume 12137, 121370S (2022) https://doi.org/10.1117/12.2621821

KEYWORDS: Microscopes, Confocal microscopy, Standards development, Optical testing, Objectives, Optical microscopes, Calibration, Spatial resolution, Spatial frequencies, Optical components

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Proceedings Article | 10 April 2013 Paper

Characterizing edge profiles of photomask structures with complementary information from SEM and AFM

Wolfgang Häßler-Grohne, Dorothee Hüser

Proceedings Volume 8681, 868133 (2013) https://doi.org/10.1117/12.2014417

KEYWORDS: Atomic force microscopy, Scanning electron microscopy, Critical dimension metrology, Convolution, Line width roughness, Photomasks, Metrology, Statistical analysis, Inverse problems, Diffusion

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SPIE Journal Paper | 29 February 2012

New developments at Physikalisch Technische Bundesanstalt in three-dimensional atomic force microscopy with tapping and torsion atomic force microscopy mode and vector approach probing strategy

Gaoliang Dai, Wolfgang Hässler-Grohne, Dorothee Hueser, Helmut Wolff, Jens Flügge, Harald Bosse

JM3, Vol. 11, Issue 1, 011004, (February 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.011004

KEYWORDS: Atomic force microscopy, 3D metrology, Critical dimension metrology, Metrology, Digital signal processing, Photomasks, Calibration, Signal processing, Signal detection, Line width roughness

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Proceedings Article | 10 June 2011 Paper

New developments at PTB in 3D-AFM with tapping and torsion AFM mode and vector approach probing strategy

G. Dai, W. Hässler-Grohne, D. Hüser, H. Wolff, J. Fluegge, H. Bosse

Proceedings Volume 8036, 80360V (2011) https://doi.org/10.1117/12.884657

KEYWORDS: Atomic force microscopy, 3D metrology, Critical dimension metrology, Digital signal processing, Photomasks, Metrology, Calibration, Line width roughness, Signal processing, Crystals

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Proceedings Article | 11 November 2002 Paper

Large AFM scans with a nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe, Dorothee Huser

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.451749

KEYWORDS: Atomic force microscopy, Calibration, Scanning probe microscopy, Actuators, Standards development, Control systems, Prototyping, Interferometers, Head, Data storage

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Proceedings Article | 10 December 2001 Paper

Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project

Hendrik Rothe, Guenther Wilkening, Dorothee Hueser

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450097

KEYWORDS: Calibration, Scanning probe microscopy, Metrology, Scanners, Microscopes, Standards development, Position sensors, Scanning probe microscopes, Feedback control, Atomic force microscopy

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Proceedings Article | 26 September 2000 Paper

AFM data analysis: separating surface microtopography from instrumental artifacts

Dorothee Hueser, Hendrik Rothe

Proceedings Volume 4100, (2000) https://doi.org/10.1117/12.401656

KEYWORDS: Atomic force microscopy, Standards development, Gaussian filters, Linear filtering, Surface finishing, Principal component analysis, Bidirectional reflectance transmission function, Data analysis, Scanning probe microscopy, Information operations

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Proceedings Article | 25 October 1999 Paper

Derivation of BRDF data from smooth surface topography of large AFM scans: investigation of the influences of surface figures and AFM artifacts

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Proceedings Volume 3784, (1999) https://doi.org/10.1117/12.366697

KEYWORDS: Atomic force microscopy, Bidirectional reflectance transmission function, Sensors, Surface finishing, Stray light, Polishing, Spatial frequencies, Spatial resolution, Optical testing, Light scattering

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Proceedings Article | 29 March 1999 Paper

Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Proceedings Volume 3619, (1999) https://doi.org/10.1117/12.343705

KEYWORDS: Sensors, Bidirectional reflectance transmission function, Stray light, Atomic force microscopy, Polishing, Optical testing, Light scattering, Surface finishing, Calibration, Scattering

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Proceedings Article | 30 October 1998 Paper

Comparison of PSD measurements using stray light sensors with PSD curves evaluated from topography of large AFM scans

Dorothee Hueser, Thomas Rinder, Hendrik Rothe

Proceedings Volume 3426, (1998) https://doi.org/10.1117/12.328475

KEYWORDS: Sensors, Stray light, Bidirectional reflectance transmission function, Scattering, Light scattering, Optical testing, Rayleigh scattering, Atomic force microscopy, Specular reflections, Spatial frequencies

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Proceedings Article | 1 April 1998 Paper

Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements

Hendrik Rothe, Dorothee Hueser, Andre Kasper

Proceedings Volume 3275, (1998) https://doi.org/10.1117/12.304389

KEYWORDS: Bidirectional reflectance transmission function, Sensors, Spherical lenses, Data modeling, Process control, Stray light, Statistical analysis, Sensor calibration, Calibration, Statistical inference

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Proceedings Article | 14 October 1997 Paper

Statistical estimators of spatial vector fields in defect classification and texture modeling of high-tech surfaces

Hendrik Rothe, Dorothee Hueser

Proceedings Volume 3167, (1997) https://doi.org/10.1117/12.290279

KEYWORDS: Image classification, Statistical analysis, Statistical modeling, Semiconducting wafers, Flat panel displays, Defect detection, Data acquisition, Spherical lenses, Bidirectional reflectance transmission function, Stray light

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Proceedings Article | 26 September 1997 Paper

Application of circular and spherical statistics for the interpretation of BRDF measurements

Hendrik Rothe, Dorothee Hueser

Proceedings Volume 3141, (1997) https://doi.org/10.1117/12.287794

KEYWORDS: Bidirectional reflectance transmission function, Spherical lenses, Stray light, Scattering, Statistical analysis, Sensors, Data modeling, Silicon, Aluminum, Copper

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Showing 5 of 13 publications

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