Dr. Douglas Holmgren
Senior Member/Technical Staff at Applied Materials Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 October 2003
Proc. SPIE. 5220, Nanofabrication Technologies
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Modulation, Laser applications, Photomasks, Raster graphics, Mask making, Semiconducting wafers, Prototyping

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