Dr. Doyoung Jang Profile

Dr. Doyoung Jang

at imec

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Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper

Standard cell architectures for N2 node: transition from FinFET to nanosheet and to forksheet device

Bilal Chehab, P. Weckx, J. Ryckaert, D. Jang, D. Verkest, A. Spessot

Proceedings Volume 11328, 1132807 (2020) https://doi.org/10.1117/12.2548573

KEYWORDS: Fin field effect transistors, Field effect transistors, Optical lithography, Metals, Extreme ultraviolet, Etching, Multiplexers, Dielectrics, Logic devices, Logic

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Proceedings Article | 27 March 2019 Presentation + Paper

Standard-cell design architecture options below 5nm node: The ultimate scaling of FinFET and Nanosheet

S. M. Yasser Sherazi, Miroslav Cupak, P. Weckx, O. Zografos, D. Jang, P. Debacker, D. Verkest, A. Mocuta, R. H. Kim, A. Spessot, J. Ryckaert

Proceedings Volume 10962, 1096202 (2019) https://doi.org/10.1117/12.2514569

KEYWORDS: Metals, Optical lithography, Fin field effect transistors, Extreme ultraviolet, Standards development, Silicon, Line edge roughness, Computer architecture, Process control

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