Dr. Du Hyun Beak
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (6)

Proceedings Article | 24 March 2017 Presentation + Paper
Du Hyun Beak, Ju Hee Shin, Tony Park, Dong Kyeng Han, Jin Phil Choi, Jeong Heung Kong, Young Seog Kang, Se Yeon Jang, Peter Nikolsky, Chris Strolenberg, Noh-Kyoung Park, Khalid Elbattay, Vito Tomasello, Austin Peng, Anand Guntuka, Zhao-Ze Li, Ronald Goossens, Machi Ryu, Jangho Shin, Chung-Yong Kim, Andrew Moe, Yun-A Sung
Proceedings Volume 10147, 101470A (2017) https://doi.org/10.1117/12.2258339
KEYWORDS: Critical dimension metrology, Scanners, Lithographic illumination, Image processing, Process control, Computational lithography, Semiconducting wafers, Data modeling, Metrology, Photomasks, Calibration, Finite element methods, Laser scanners, 3D scanning

Proceedings Article | 12 April 2013 Paper
Du Hyun Beak, Jin Phil Choi, Tony Park, Young Sun Nam, Young Seog Kang, Chan-Hoon Park, Ki-Yeop(Chris) Park, Chang-Hoon Ryu, Wenjin Huang, Ki-Ho Baik
Proceedings Volume 8683, 86831Q (2013) https://doi.org/10.1117/12.2012135
KEYWORDS: Photomasks, Wavefronts, Calibration, 3D modeling, Scanners, Control systems, Semiconducting wafers, Data modeling, Reticles, Diffraction

Proceedings Article | 21 February 2008 Paper
Proceedings Volume 6874, 68740H (2008) https://doi.org/10.1117/12.763243
KEYWORDS: Amplifiers, Mirrors, Laser scattering, Phase conjugation, Scattering, Laser systems engineering, Ferroelectric materials, Phase shift keying, Beam splitters, Laser stabilization

Proceedings Article | 14 February 2007 Paper
Proceedings Volume 6454, 64540E (2007) https://doi.org/10.1117/12.701385
KEYWORDS: Acoustics, Scattering, Laser scattering, High power lasers, Mirrors, Beam splitters, Wave plates, Oscilloscopes, Optical components, Reflectivity

Proceedings Article | 14 February 2007 Paper
Proceedings Volume 6454, 64540B (2007) https://doi.org/10.1117/12.700516
KEYWORDS: Reflectivity, Polarization, Scattering, Mirrors, Laser scattering, Wave plates, Beam splitters, Optical isolators, Quantum wells, Oscillators

Showing 5 of 6 publications
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