Dr. Du Hyun Beak
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Metrology, Lithographic illumination, Data modeling, Calibration, Image processing, Scanners, Laser scanners, Process control, Finite element methods, Photomasks, Computational lithography, 3D scanning, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 12 April 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Diffraction, Reticles, Data modeling, Calibration, Scanners, Wavefronts, Control systems, 3D modeling, Photomasks, Semiconducting wafers

Proceedings Article | 21 February 2008
Proc. SPIE. 6874, High Energy/Average Power Lasers and Intense Beam Applications II
KEYWORDS: Phase conjugation, Mirrors, Beam splitters, Ferroelectric materials, Scattering, Laser scattering, Amplifiers, Phase shift keying, Laser stabilization, Laser systems engineering

Proceedings Article | 14 February 2007
Proc. SPIE. 6454, High Energy/Average Power Lasers and Intense Beam Applications
KEYWORDS: Mirrors, Beam splitters, Quantum wells, Oscillators, Polarization, Scattering, Laser scattering, Reflectivity, Wave plates, Optical isolators

Proceedings Article | 14 February 2007
Proc. SPIE. 6454, High Energy/Average Power Lasers and Intense Beam Applications
KEYWORDS: Optical components, Mirrors, Beam splitters, Scattering, High power lasers, Laser scattering, Reflectivity, Wave plates, Oscilloscopes, Acoustics

Showing 5 of 6 publications
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