Duane C. Holmes
Engineering Consultant
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 September 1994
Proc. SPIE. 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing
KEYWORDS: Semiconducting wafers, Reflectivity, Microscopes, Thin films, Signal detection, Reflectometry, Silicon, Sensors, Gaussian beams, Objectives

Proceedings Article | 1 June 1990
Proc. SPIE. 1261, Integrated Circuit Metrology, Inspection, and Process Control IV
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Inspection, Electron beams, Integrated circuits, Metrology, Process control, Wafer-level optics, Electron microscopes, Optical testing

Proceedings Article | 1 June 1990
Proc. SPIE. 1261, Integrated Circuit Metrology, Inspection, and Process Control IV
KEYWORDS: Critical dimension metrology, Video, Scanning electron microscopy, Edge roughness, Inspection, Cadmium, Process control, Integrated circuits, Metrology, Electron microscopes

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top