Mr. Dukhyung Lee
at Seoul National Univ
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | May 3, 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Photoresist materials, Etching, Scanning electron microscopy, Metals, Atomic layer deposition, Ion beams, Chromium, Photomasks, Gold, Lithography

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