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Dr. Dusan Petranovic
at Mentor, a Siemens Business
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Publications (1)
Proceedings Article | 29 March 2013 Paper
Double patterning: solutions in parasitic extraction
Dusan Petranovic, James Falbo, Nur Kurt-Karsilayan
Proceedings Volume 8684, 86840M (2013) https://doi.org/10.1117/12.2010838
KEYWORDS: Photomasks, Double patterning technology, Capacitance, Dielectrics, Statistical analysis, Extreme ultraviolet, Optical lithography, Visualization, Manufacturing, Image processing
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