Ms. Dvori Stoler
Marketing Manager at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 25, 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Databases, Manufacturing, Inspection, Control systems, Photomasks, Computed tomography, Optical proximity correction, Mask making, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 27, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Metrology, Calibration, Pattern recognition, Scanning electron microscopy, Design for manufacturing, Optical proximity correction, Computer aided design, Algorithm development, Semiconducting wafers, Resolution enhancement technologies

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