Dr. Dzung Viet Dao
at Ritsumeikan Univ
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 1 October 2009
JM3 Vol. 8 Issue 04
KEYWORDS: Polymethylmethacrylate, Silicon, Actuators, Microactuators, Polymers, Polymeric actuators, Gold, Electrodes, Laser cutting, Scanning electron microscopy

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Actuators, Gold, Ferroelectric materials, Microfluidics, Etching, Silicon, Photomasks, Aluminum, Semiconducting wafers, Device simulation

Proceedings Article | 29 December 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Microelectromechanical systems, Sensors, Calibration, Silicon, Resistance, Signal processing, Gyroscopes, Structural sensing, Temperature metrology, Virtual colonoscopy

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