Prof. Eberhard Manske
Head of Dept of Precision Measurement Technology at Technische Univ Ilmenau
SPIE Involvement:
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Publications (46)

Proceedings Article | 1 April 2020 Presentation + Paper
Proc. SPIE. 11352, Optics and Photonics for Advanced Dimensional Metrology
KEYWORDS: Fourier spectroscopy, Diffraction, Metrology, Sensors, Video, Wavefront sensors, Wavefronts, Scatterometry, Binary data, Inverse optics

Proceedings Article | 1 April 2020 Presentation + Paper
Proc. SPIE. 11352, Optics and Photonics for Advanced Dimensional Metrology
KEYWORDS: Diffraction, Metrology, Polarization, Sensors, Computer simulations, 3D modeling, Optical metrology, Finite element methods, Diffraction gratings

Proceedings Article | 1 April 2020 Presentation + Paper
Proc. SPIE. 11352, Optics and Photonics for Advanced Dimensional Metrology
KEYWORDS: Microelectromechanical systems, Signal to noise ratio, Confocal microscopy, Monochromatic aberrations, Modulation, Sensors, Objectives, Signal detection

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Actuators, Nanotechnology, Mirrors, Interferometers, Manufacturing, Physics, Control systems, Atomic force microscopy, Nanofabrication, Near field optics

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Semiconductors, Actuators, Electron beams, Metrology, Inspection, Atomic force microscopy, Optical inspection, Photomasks, Charged particle optics, Chemical mechanical planarization

Showing 5 of 46 publications
Conference Committee Involvement (6)
Optical Measurement Systems for Industrial Inspection XII
21 June 2021 | Munich, Germany
Optical Measurement Systems for Industrial Inspection XI
24 June 2019 | Munich, Germany
Optical Measurement Systems for Industrial Inspection X
26 June 2017 | Munich, Germany
Optical Measurement Systems for Industrial Inspection IX
22 June 2015 | Munich, Germany
Optical Measurement Systems for Industrial Inspection VIII
13 May 2013 | Munich, Germany
Showing 5 of 6 Conference Committees
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