Prof. Eberhard Manske
Head of Dept of Precision Measurement Technology at Technische Univ Ilmenau
SPIE Involvement:
Conference Program Committee | Author
Websites:
Publications (41)

Proceedings Article | 21 June 2019
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Frequency combs, Precision measurement, Helium neon lasers, Laser metrology, Sensor technology, Optics manufacturing

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Diffraction, Metrology, Polarization, Sensors, 3D modeling, Instrument modeling

Proceedings Article | 21 June 2019
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Lithography, Optical lithography, Interferometers, Sensors, Silicon, Laser processing, Scanning probe lithography, Photoresist materials, Nanofabrication, Absorption

Proceedings Article | 21 June 2019
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Confocal microscopy, Chromatic aberrations, Birefringence, Calibration, Spectroscopy, Manufacturing, Objectives, 3D profilers

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Nanotechnology, Lithography, Nanostructures, Metrology, Optical lithography, Interferometers, Scanning probe lithography, Atomic force microscopy, Nanofabrication, Multiphoton lithography

Showing 5 of 41 publications
Conference Committee Involvement (5)
Optical Measurement Systems for Industrial Inspection XI
24 June 2019 | Munich, Germany
Optical Measurement Systems for Industrial Inspection X
26 June 2017 | Munich, Germany
Optical Measurement Systems for Industrial Inspection IX
22 June 2015 | Munich, Germany
Optical Measurement Systems for Industrial Inspection VIII
13 May 2013 | Munich, Germany
Optical Measurement Systems for Industrial Inspection
23 May 2011 | Munich, Germany
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