Dr. Eberhard Adolf Spiller
Retired at
SPIE Involvement:
Fellow status | Conference Co-Chair | Conference Chair | Author
Publications (63)

PROCEEDINGS ARTICLE | June 5, 2018
Proc. SPIE. 10691, Advances in Optical Thin Films VI
KEYWORDS: Multilayers, Data modeling, X-rays, Interfaces, Silicon, Reflectivity, Silicon carbide, Molybdenum, Systems modeling

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Mirrors, Metrology, Optical coatings, Wavefronts, Optical fabrication, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

SPIE Journal Paper | September 6, 2013
OE Vol. 52 Issue 09
KEYWORDS: Mirrors, Extreme ultraviolet, Reflectivity, Multilayers, Imaging systems, Ultraviolet radiation, Optical coatings, EUV optics, Spatial frequencies, Optical engineering

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Lithography, Mirrors, Multilayers, Metrology, Wavefronts, Optical testing, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8501, Advances in Metrology for X-Ray and EUV Optics IV
KEYWORDS: Telescopes, Mirrors, Multilayers, Spatial frequencies, Calibration, Optical coatings, Reflectivity, Space telescopes, Extreme ultraviolet, EUV optics

PROCEEDINGS ARTICLE | September 17, 2012
Proc. SPIE. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
KEYWORDS: Mirrors, Multilayers, Data modeling, Calibration, Silicon, Reflectivity, Space telescopes, Extreme ultraviolet, Silicon carbide, Statistical modeling

Showing 5 of 63 publications
Conference Committee Involvement (2)
Multilayer and Grazing Incidence X-Ray/EUV Optics II
14 July 1993 | San Diego, CA, United States
High Resolution Soft X-Ray Optics
16 November 1981 | Upton, United States
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