Dr. Edgar Voelkl Profile

Dr. Edgar Voelkl

at HoloWerk LLC

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 26 April 2016 Paper

Digital holography with electron wave: measuring into the nanoworld

Fernando Mendoza Santoyo, Edgar Voelkl

Proceedings Volume 9890, 989006 (2016) https://doi.org/10.1117/12.2235172

KEYWORDS: Holography, Holograms, Holographic interferometry, Digital holography, Monochromatic aberrations, Electron beams, Chemical species, Electron microscopes, Light sources, Wavefronts

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Proceedings Article | 15 July 2003 Paper

Semiconductor wafer defect detection using digital holography

Mark Schulze, Martin Hunt, Edgar Voelkl, Joel Hickson, William Usry, Randall Smith, Robert Bryant, C. Thomas

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485237

KEYWORDS: Digital holography, Semiconducting wafers, Defect detection, Inspection, Scanning electron microscopy, Visualization, Holograms, Wavefronts, Digital imaging, Image visualization

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Proceedings Article | 12 July 2002 Paper

Direct to digital holography for semiconductor wafer defect detection and review

C. Thomas, Tracy Bahm, Larry Baylor, Philip Bingham, Steven Burns, Matt Chidley, Long Dai, Robert Delahanty, Christopher Doti, Ayman El-Khashab, Robert Fisher, Judd Gilbert, James Goddard, Gregory Hanson, Joel Hickson, Martin Hunt, Kathy Hylton, George John, Michael Jones, Ken Macdonald, Michael Mayo, Ian McMackin, Dave Patek, John Price, David Rasmussen, Louis Schaefer, Thomas Scheidt, Mark Schulze, Philip Schumaker, Bichuan Shen, Randall Smith, Allen Su, Kenneth Tobin, William Usry, Edgar Voelkl, Karsten Weber, Paul Jones, Robert Owen

Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475659

KEYWORDS: Holograms, Digital holography, Holography, Semiconducting wafers, Cameras, Deep ultraviolet, Spatial frequencies, Beam splitters, Digital video recorders, Fourier transforms

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