Edi Wibowo
at Univ of New South Wales
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Thin films, Titanium, Nickel, Silicon, Heat treatments, Silicon films, Reactive ion etching, Semiconducting wafers, Temperature metrology, Protactinium

Proceedings Article | 21 November 2001
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Thin films, Rutherfordium, Sputter deposition, Crystals, X-ray diffraction, Nickel, Telecommunications, Electrical engineering, Shape memory alloys, Temperature metrology

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