Prof. Eduard Arzt
Scientific Director Chairman at Leibniz-Institut fuer Neue Materialien GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 May 1993 Paper
Proc. SPIE. 1805, Submicrometer Metallization: Challenges, Opportunities, and Limitations
KEYWORDS: Aluminum, Copper, Crystals, Photomicroscopy, Diffraction, Crystallography, Scanning electron microscopy, Reliability, Diffusion, Interfaces

Conference Committee Involvement (3)
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
Smart Sensors, Actuators and MEMS
4 May 2009 | Dresden, Germany
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