Dr. Eduardo Margallo-Balbás
CEO at Ommatidia LIDAR S.L.
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 27 April 2016
Proc. SPIE. 9888, Micro-Optics 2016
KEYWORDS: Microlens, Silicon, Photoresist materials, Optical coherence tomography, Etching, Plasma etching, Image quality, Semiconducting wafers, Tomography, Infrared imaging, Photoresist processing, Surface roughness, Oxides, Dry etching, Thermal oxidation

SPIE Journal Paper | 22 November 2012
JNP Vol. 6 Issue 01
KEYWORDS: Waveguides, Silicon carbide, Refractive index, Plasma enhanced chemical vapor deposition, Biological and chemical sensing, Silicon, Sensors, Oxides, Wave propagation, Interfaces

Proceedings Article | 1 May 2012
Proc. SPIE. 8424, Nanophotonics IV
KEYWORDS: Waveguides, Silicon carbide, Plasma enhanced chemical vapor deposition, Atomic layer deposition, Sensors, Refractive index, Absorption, Silicon, Silica, Titanium dioxide

Proceedings Article | 15 May 2010
Proc. SPIE. 7715, Biophotonics: Photonic Solutions for Better Health Care II
KEYWORDS: Silicon carbide, Waveguides, Optical coherence tomography, Plasma enhanced chemical vapor deposition, Birefringence, Dispersion, Refractive index, Cladding, Silica, Semiconducting wafers

Proceedings Article | 28 February 2008
Proc. SPIE. 6847, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine XII
KEYWORDS: Silicon, Optical coherence tomography, Waveguides, Platinum, Temperature metrology, Oxides, Silicon photonics, Semiconducting wafers, Resistance, Photonic integrated circuits

Showing 5 of 9 publications
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