Edward Lauder
at Intel Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Diffractive optical elements, Phase modulation, Etching, Manufacturing, Chromium, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

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