Dr. Edward Ng
at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Etching, Polymers, Annealing, Silicon, Scanning electron microscopy, Directed self assembly, Line edge roughness, Photomicroscopy, Semiconducting wafers

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Etching, Dry etching, Polymers, Annealing, Coating, Scanning electron microscopy, Directed self assembly, Plasma etching, Photomicroscopy

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Oxides, Etching, Metals, Silicon, Resistance, Chemical vapor deposition, Atomic layer deposition, Wet etching, Semiconductor manufacturing, Semiconducting wafers

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Etching, Polymers, Silicon, Coating, Fourier transforms, Plasma etching, 193nm lithography, Plasma, Bottom antireflective coatings

Proceedings Article | 11 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Etching, Polymers, Silicon, Fourier transforms, Scanning electron microscopy, Plasma etching, Semiconducting wafers, Plasma, Bottom antireflective coatings

Showing 5 of 7 publications
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