Edward Kah Ching Teoh
at Motivo Inc
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | April 3, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Analytics, Lithography, Metrology, Statistical analysis, Databases, Pattern recognition, Manufacturing, Computer simulations, Machine learning, Integrated circuits, Computational lithography, Optical proximity correction, Integrated circuit design, Product engineering, Yield improvement, Design for manufacturability

PROCEEDINGS ARTICLE | March 26, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Statistical analysis, Data modeling, Metals, Manufacturing, Design for manufacturing, Image classification, Raster graphics, Optimization (mathematics), Current controlled current source, Design for manufacturability

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9053, Design-Process-Technology Co-optimization for Manufacturability VIII
KEYWORDS: Multilayers, Databases, Metals, Manufacturing, Profiling, Design for manufacturing, Raster graphics, Optical alignment, Electronic design automation, Design for manufacturability

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9053, Design-Process-Technology Co-optimization for Manufacturability VIII
KEYWORDS: Data mining, Lithography, Databases, Image processing, Silicon, Manufacturing, Image classification, Optical proximity correction, Raster graphics, Tolerancing

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Lithography, Silicon, Laser Doppler velocimetry, Design for manufacturing, Transistors, Standards development, Simulation of CCA and DLA aggregates, Instrument modeling, Current controlled current source, Design for manufacturability

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