Dr. Egbert Buhr
at Physikalisch Technische Bundesanstalt
SPIE Involvement:
Publications (19)

Proceedings Article | 2 November 2015 Paper
D. Bergmann, B. Bodermann, H. Bosse, E. Buhr, G. Dai, R. Dixson, W. Häßler-Grohne, K. Hahm, M. Wurm
Proceedings Volume 9636, 96360S (2015) https://doi.org/10.1117/12.2199453
KEYWORDS: Photomasks, Metrology, Critical dimension metrology, Microscopes, Manufacturing, Standards development, Data modeling, Dimensional metrology, Scanning electron microscopy, Line width roughness, Opacity, Calibration, Atomic force microscopy

Proceedings Article | 13 May 2013 Paper
Bernd Bodermann, Rainer Köning, Detlef Bergmann, Egbert Buhr, Wolfgang Hässler-Grohne, Jens Flügge, Harald Bosse
Proceedings Volume 8788, 87881S (2013) https://doi.org/10.1117/12.2021888
KEYWORDS: Calibration, Optical testing, Microscopes, Imaging systems, Edge roughness, Metrology, Objectives, Photomasks, Geometrical optics, Diffraction

Proceedings Article | 23 September 2009 Paper
B. Bodermann, D. Bergmann, E. Buhr, W. Hässler-Grohne, H. Bosse, J. Potzick, R. Dixson, R. Quintanilha, M. Stocker, A. Vladar, N. Orji
Proceedings Volume 7488, 74881H (2009) https://doi.org/10.1117/12.831373
KEYWORDS: Photomasks, Scanning electron microscopy, Standards development, Metrology, Ultraviolet radiation, Microscopes, Atomic force microscopy, Calibration, Critical dimension metrology, Microscopy

Proceedings Article | 17 October 2008 Paper
J. Potzick, R. Dixson, R. Quintanilha, M. Stocker, A. Vladar, E. Buhr, W. Häßler-Grohne, B. Bodermann, C. G. Frase, H. Bosse
Proceedings Volume 7122, 71222P (2008) https://doi.org/10.1117/12.801435
KEYWORDS: Photomasks, Metrology, Scanning electron microscopy, Calibration, Microscopes, Chromium, Ultraviolet radiation, Standards development, Critical dimension metrology, Interferometers

Proceedings Article | 3 October 2008 Paper
Proceedings Volume 7155, 71550V (2008) https://doi.org/10.1117/12.814531
KEYWORDS: Diffraction, Microscopes, Metrology, Photomasks, Sensors, Microscopy, Extreme ultraviolet, Deep ultraviolet, Polarization, Scatterometry

Showing 5 of 19 publications
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