Dr. Egbert Buhr
at Physikalisch Technische Bundesanstalt
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 2 November 2015
Proc. SPIE. 9636, Scanning Microscopies 2015
KEYWORDS: Microscopes, Metrology, Data modeling, Opacity, Calibration, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Dimensional metrology, Photomasks, Line width roughness, Critical dimension metrology, Standards development

Proceedings Article | 13 May 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Microscopes, Diffraction, Metrology, Imaging systems, Calibration, Optical testing, Objectives, Photomasks, Geometrical optics, Edge roughness

Proceedings Article | 23 September 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Microscopes, Metrology, Calibration, Ultraviolet radiation, Microscopy, Atomic force microscopy, Scanning electron microscopy, Photomasks, Critical dimension metrology, Standards development

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Microscopes, Metrology, Interferometers, Calibration, Ultraviolet radiation, Chromium, Scanning electron microscopy, Photomasks, Critical dimension metrology, Standards development

Proceedings Article | 3 October 2008
Proc. SPIE. 7155, Ninth International Symposium on Laser Metrology
KEYWORDS: Microscopes, Diffraction, Metrology, Deep ultraviolet, Polarization, Sensors, Microscopy, Scatterometry, Photomasks, Extreme ultraviolet

Showing 5 of 19 publications
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