Dr. Egor S. Gorlachev
at Institute of Physics and Technology of RAS
SPIE Involvement:
Conference Program Committee | Author
Publications (3)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Switching, Electrodes, Particles, Silicon, Manufacturing, Oxygen, Oxidation

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Amorphous silicon, Nanostructures, Etching, Argon, Silicon, Platinum, Scanning electron microscopy, Plasma etching, Plasma, Nanowires

Proceedings Article | 26 February 2010
Proc. SPIE. 7521, International Conference on Micro- and Nano-Electronics 2009
KEYWORDS: Nanostructuring, Statistical analysis, Scattering, Crystals, X-rays, X-ray diffraction, Silicon, Reflectometry, Electrochemical etching, Lead

Conference Committee Involvement (1)
The International Conference on Micro- and Nano-Electronics 2018
1 October 2018 | Zvenigorod, Russian Federation
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