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Egor Lebedev
at MIET
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 30 December 2016 Paper
Integral planar supercapacitor with CNT-based composite electrodes for heat-sensitive MEMS and NEMS
E. Lebedev, A. Alekseyev, I. Gavrilin, A. Sysa, E. Kitsyuk, R. Ryazanov, D. Gromov
Proceedings Volume 10224, 102241F (2016) https://doi.org/10.1117/12.2267079
KEYWORDS: Electrodes, Composites, Particles, Carbon nanotubes, Deposition processes, Scanning electron microscopy, Carbon, Microelectromechanical systems, Nanoelectromechanical systems, Semiconducting wafers
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