Prof. Eiji Higurashi
Associate Professor at Univ of Tokyo
SPIE Involvement:
Conference Chair | Conference Co-Chair | Author
Publications (10)

Proceedings Article | 13 March 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Optical components, Waveguides, Argon, Silicon, Oxygen, Semiconductor lasers, Electromagnetic coupling, Compound semiconductors, Plasma, Hybrid silicon lasers

Proceedings Article | 10 October 2007
Proc. SPIE. 6717, Optomechatronic Micro/Nano Devices and Components III
KEYWORDS: Etching, Argon, Interfaces, Gallium arsenide, Silicon, Surface roughness, Atomic force microscopy, Gallium nitride, Sapphire, Protactinium

SPIE Conference Volume | 8 October 2007

Proceedings Article | 18 October 2006
Proc. SPIE. 6376, Optomechatronic Micro/Nano Devices and Components II
KEYWORDS: Gold, Optical components, Thin films, Waveguides, Argon, Silicon, Scanning electron microscopy, Silicon films, Temperature metrology, Plasma

SPIE Conference Volume | 13 October 2006

Showing 5 of 10 publications
Conference Committee Involvement (4)
Optomechatronic Micro/Nano Devices and Components
8 October 2007 | Lausanne, Switzerland
Optomechatronic Micro/Nano Devices and Components II
4 October 2006 | Boston, Massachusetts, United States
Optomechatronic Micro/Nano Devices and Components
5 December 2005 | Sapporo, Japan
Optomechatronic Micro/Nano Components, Devices, and Systems
27 October 2004 | Philadelphia, Pennsylvania, United States
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