Mr. Eike Zeller Profile

Eike Zeller

at RMIT Univ

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Proceedings Article | 5 January 2009 Paper

Sealed air-core planar waveguide arrays in SU8 epoxy

Eike Zeller, Arnan Mitchell

Proceedings Volume 7269, 72690E (2009) https://doi.org/10.1117/12.814377

KEYWORDS: Waveguides, Rhodamine, Refractive index, Positron emission tomography, Silicon, Cladding, Epoxies, Planar waveguides, Microfluidics, Solids

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Nonlinear optics in fluid infiltrated air structured 'holey' fibres has attracted much research interest due to the flexibility of infiltration materials and geometries that are possible. Equivalently to these 2D examples, planar structures with 1D arrays of air holes can offer a complimentary platform for nonlinear optics investigations. Importantly, if these structures can be photolithographically defined with longitudinal variations, then a rich array of periodic nonlinear phenomena can be studied. We present a novel planar integrated optic platform for fluid infiltration experiments. The platform consists of layers of SU8 epoxy fabricated with 3×3 μm photolithographically defined microfluidic channels. The channel layer can be doped with rhodamine in order to increase its refractive index to enable vertical confinement and also provides a fluorescent trace to clearly indicate the path of the light. The air channels can be filled with fluids, such as high refractive index oil, to act as optical waveguides in the visible range. Our fabrication consists of spin coating and curing the SU8 lower cladding. We then spin-coat and cure the doped SU8 channel layer and pattern using conventional photolithography. In order to seal the channels with the upper cladding, an SU8 dry film is applied using lamination techniques. The fabrication process is highly flexible and can be easily extended to more complex waveguides like splits, mach zehnder structures. Multiple layers of fluid-infiltrated channels are also possible.

Proceedings Article | 5 January 2009 Paper

Lithographically defined intersecting optical waveguides and fluidic channels

Tanveer Mahmud, Eike Zeller, Christian Karnutsch, Arnan Mitchell

Proceedings Volume 7269, 72690F (2009) https://doi.org/10.1117/12.814124

KEYWORDS: Waveguides, Microfluidics, Positron emission tomography, Photomasks, Rhodamine, Silicon, Cladding, Silicon films, Fabrication, Adhesives

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Many optofluidic devices rely on interfacing optical waveguides with microfluidic channels. Often it can be difficult to realize micron scale waveguides and fluidic channels that are 100 times larger on the same platform. Further, it is often desirable for an optical waveguide intersection to occur at the vertical centre of a fluidic channel rather than at its top or at its bottom where the fluid is effectively stationary. We present a platform for optofluidics which can achieve straightforward integration of large scale fluidic channels and micron scale waveguides in the epoxy material SU8. A soft imprinting technique is used to define the optical waveguides as a thin inverted rib core layer between two thick cladding layers. The core is doped with Rhodamine dye to increase the refractive index and render it optically active for potential use as a lasing material. The fluidic channels are then formed by a single exposure through the core and both claddings.

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