Dr. Elena Yu Taracheva
at Fraunhofer IOF
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 September 2007
Proc. SPIE. 6705, Advances in X-Ray/EUV Optics and Components II
KEYWORDS: Multilayers, Optical properties, Silicon, Optical coatings, Reflectivity, Surface roughness, Atomic force microscopy, Laser induced fluorescence, Aluminum, Vacuum ultraviolet

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