High-reflective multilayer coatings were designed at the wavelength of 106 nm and deposited by different deposition
technologies (magnetron sputtering, thermal and e-beam evaporations). Various capping layers were suggested to protect
Al/LiF coatings against the surface degradation. The microstructure and the surface morphology of all coatings were
studied by Small Angle X-ray Reflectometry (SAXR) and Atomic Force Microscopy (AFM) methods. The optical
properties were characterized in the Vacuum Ultraviolet (VUV) spectral range by VUV-reflectometry. Finally, the aging
stability of coatings was studied.