Dr. Elizabeth A. Dobisz
Owner
SPIE Involvement:
Conference Program Committee | Editor | Author
Publications (12)

SPIE Journal Paper | 7 August 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Nanoimprint lithography, Chromium, Reactive ion etching, Lithography, Silicon, Double patterning technology, Electron beam lithography, Polymethylmethacrylate, Magnetism, Directed self assembly

Proceedings Article | 21 March 2012 Paper
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Chromium, Directed self assembly, Double patterning technology, Reactive ion etching, Beam propagation method, Plasma

Proceedings Article | 21 March 2012 Paper
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Electron beam lithography, Silicon, Magnetism, Chromium, Oxygen, Directed self assembly, Double patterning technology, Nanoimprint lithography, Reactive ion etching

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Oxides, Lithography, Electron beam lithography, Sensors, Etching, Silicon, Magnetism, Scanning electron microscopy, Head, Beam propagation method

SPIE Journal Paper | 1 January 2011
JNP Vol. 5 Issue 01
KEYWORDS: Nanoengineering, Nanolithography, Solar energy, Integrated optics, Wind energy, Glasses, Data storage, Sensors, System on a chip, Photonics

Showing 5 of 12 publications
Proceedings Volume Editor (18)

SPIE Conference Volume | 16 October 2018

SPIE Conference Volume | 28 September 2017

SPIE Conference Volume | 22 September 2015

SPIE Conference Volume | 16 September 2014

Showing 5 of 18 publications
Conference Committee Involvement (29)
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII
1 August 2021 | San Diego, California, United States
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII
24 August 2020 | Online Only, California, United States
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI
11 August 2019 | San Diego, California, United States
Nanoengineering: Fabrication, Properties, Optics, and Devices XV
21 August 2018 | San Diego, California, United States
Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
9 August 2017 | San Diego, California, United States
Showing 5 of 29 Conference Committees
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