Dr. Emily J. Carr
MEMS Engineer at Glimmerglass Networks Inc
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | February 5, 2010
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Switching, Electrodes, Dielectrics, Silicon, Reliability, Micromirrors, Optical switching

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Microelectromechanical systems, Mirrors, Switches, Seaborgium, Reliability, Epoxies, Optical switching, Semiconducting wafers, Optics manufacturing, Wafer bonding

PROCEEDINGS ARTICLE | February 14, 2007
Proc. SPIE. 6467, MEMS Adaptive Optics
KEYWORDS: Actuators, Mirrors, Teeth, Silicon, Adaptive optics, 3D modeling, Micromirrors, Photomasks, Deep reactive ion etching, Semiconducting wafers

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6113, MEMS/MOEMS Components and Their Applications III
KEYWORDS: Actuators, Optical fabrication equipment, Teeth, Adaptive optics, Deformable mirrors, 3D modeling, Optical fabrication, Scanning electron microscopy, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | January 20, 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Microelectromechanical systems, Actuators, Telescopes, Mirrors, Astronomy, Electronics, Electrodes, Adaptive optics, Deformable mirrors, Microopto electromechanical systems

PROCEEDINGS ARTICLE | February 4, 2002
Proc. SPIE. 4494, Adaptive Optics Systems and Technology II
KEYWORDS: Microelectromechanical systems, Signal to noise ratio, Telescopes, Speckle, Wavefront sensors, Wavefronts, Adaptive optics, Exoplanets, Space telescopes, Planets

Showing 5 of 7 publications
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