Dr. Emily E. Gallagher
Principal Engineer at IMEC
SPIE Involvement:
Fellow status | Senior status | Conference Program Committee | Conference Chair | Author | Editor
Publications (69)

PROCEEDINGS ARTICLE | October 18, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Metrology, Liquid phase epitaxy, Error analysis, Inspection, Photomasks, Extreme ultraviolet, Cadmium sulfide, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Diffraction, Reticles, Scattering, Coating, Inspection, Pellicles, Image quality, Extreme ultraviolet

PROCEEDINGS ARTICLE | April 23, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Scattering, Scanners, Particles, Silicon, Hydrogen, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

SPIE Conference Volume | December 5, 2017

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Mirrors, Spectroscopy, Silicon, Reflectivity, Pellicles, Reflectometry, Transmittance, Extreme ultraviolet, Reflectance spectroscopy, Carbon nanotubes

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Thin films, Reticles, Scanners, Particles, Coating, Resistance, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon nanotubes

Showing 5 of 69 publications
Conference Committee Involvement (22)
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography IX
26 February 2018 | San Jose, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography VIII
27 February 2017 | San Jose, California, United States
Showing 5 of 22 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top