Emma Litterio
at STMicroelectronics
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Chemistry, Manufacturing, Reliability, Photoresist materials, Semiconductor manufacturing, Photosensitive materials, Semiconducting wafers, Yield improvement

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Polymers, Coating, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, System on a chip, Liquids

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Polymers, Silicon, Optical microscopy, Coating, Scanning electron microscopy, Photomasks, Semiconducting wafers

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Optical lithography, Data modeling, Metals, Artificial neural networks, Photoresist materials, Neural networks, Machine learning, Convolution, Critical dimension metrology, Evolutionary algorithms

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