Emma Litterio
at STMicroelectronics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Semiconducting wafers, Coating, Polymers, Scanning electron microscopy, Photomasks, Silicon, Lithography, Optical microscopy

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Critical dimension metrology, Metals, Data modeling, Neural networks, Photoresist materials, Convolution, Artificial neural networks, Machine learning, Optical lithography, Evolutionary algorithms

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