Emmanuel Drege
Senior Member of Consulting Staff at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 16 July 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Semiconductors, Lithography, Diffraction, Optical design, Metrology, Error analysis, Reflectivity, Scatterometry, Structural design, Diffraction gratings

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Wafer-level optics, Diffraction, Optical design, Error analysis, Reflectivity, Control systems, Scatterometry, Critical dimension metrology, Structural design, Scatter measurement

SPIE Journal Paper | 1 January 2002
OE Vol. 41 Issue 01
KEYWORDS: Reflectivity, Polarization, Diffraction, Optical design, Optical engineering, Structural design, Lithography, Computer simulations, Semiconducting wafers, Diffraction gratings

Proceedings Article | 2 June 2000
Proc. SPIE. 3998, Metrology, Inspection, and Process Control for Microlithography XIV
KEYWORDS: Lithography, Diffraction, Detection and tracking algorithms, Polarization, Ions, Reflectivity, Computer simulations, Scatterometry, Structural design, Diffraction gratings

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