Dr. Emmanuel Nolot
at MINATEC
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 11, 2012
Proc. SPIE. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
KEYWORDS: Oxides, Thin films, Metrology, Silica, Metals, X-rays, Germanium, Silicon, Reflectometry, Semiconducting wafers

PROCEEDINGS ARTICLE | September 1, 2005
Proc. SPIE. 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
KEYWORDS: Air contamination, X-rays, Dielectrics, Silicon, Light scattering, Reflectivity, Scanning electron microscopy, Aluminum, Semiconducting wafers, Hybrid fiber optics

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