Dr. Emmanuel P. Quevy
at Univ of Califonia Berkeley
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 29 December 2004
Proc. SPIE. 5593, Nanosensing: Materials and Devices
KEYWORDS: Microelectromechanical systems, Oscillators, Solar energy, Resonators, Sensors, Electrodes, Germanium, Transducers, Aluminum nitride, Nonlinear filtering

Proceedings Article | 2 October 2001
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Microelectromechanical systems, Actuators, Reliability, Photodiodes, 3D modeling, Structural health monitoring, Low pressure chemical vapor deposition, Microfabrication, Semiconducting wafers, 3D microstructuring

Proceedings Article | 30 April 2001
Proc. SPIE. 4407, MEMS Design, Fabrication, Characterization, and Packaging
KEYWORDS: Actuators, Gold, Mirrors, Electrodes, Silicon, Adaptive optics, Silicon films, Beam shaping, Translucency, Semiconducting wafers

Proceedings Article | 5 April 2001
Proc. SPIE. 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
KEYWORDS: Actuators, Modeling, Atrial fibrillation, Reliability, Photodiodes, Numerical integration, Structural health monitoring, Microfabrication, Semiconducting wafers, 3D microstructuring

Proceedings Article | 5 April 2001
Proc. SPIE. 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
KEYWORDS: Microelectromechanical systems, Actuators, Chemical species, Capillaries, Molecules, Dielectrics, 3D modeling, Signal processing, Liquids, 3D microstructuring

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