Dr. Emmanuel Saucedo-Flores
at Univ de Guadalajara
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Optical lithography, Etching, Silicon, Photoresist materials, Low pressure chemical vapor deposition, Micromachining, Standards development

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