En Chuan Lio
Manager at United Microelectronics Corp
SPIE Involvement:
Publications (7)

Proceedings Article | 22 February 2021 Presentation + Paper
Jia Hung Chang, En Chuan Lio, Junjin Lin, Tang Chun Weng, Bill Lin, Patrick Lomtscher, Martin Freitag, Stefan Buhl, Hsiao Lin Hsu, Rex Liu
Proceedings Volume 11613, 116130K (2021) https://doi.org/10.1117/12.2583620

Proceedings Article | 13 March 2018 Paper
Proceedings Volume 10585, 105851R (2018) https://doi.org/10.1117/12.2297358
KEYWORDS: Optical alignment, Semiconducting wafers, Reticles, Overlay metrology, Data modeling, Neodymium, HVAC controls, Distortion, Calibration, Roads

Proceedings Article | 13 March 2018 Paper
Proceedings Volume 10585, 105851H (2018) https://doi.org/10.1117/12.2299299
KEYWORDS: Overlay metrology, Etching, Lithography, Semiconducting wafers, Metrology, Critical dimension metrology, Molybdenum, Information operations, Optical lithography, Double patterning technology

Proceedings Article | 28 March 2017 Paper
Ming-Jui Chen, Chun-Chi Yu, Tang Chun Weng, C.-H. Chang, Charlie Chen, Chia Ching Lin, En Chuan Lio, Chia Hsiang Yu
Proceedings Volume 10145, 1014525 (2017) https://doi.org/10.1117/12.2257631
KEYWORDS: Data modeling, Solids, Scanners, Stars, Mathematical modeling

Proceedings Article | 3 October 2016 Paper
Tuan-Yen Yu, En Chuan Lio, Po Tsang Chen, Chih I Wei, Yi Ting Chen, Ming Chun Peng, William Chou, Chun Chi Yu
Proceedings Volume 9985, 99850Y (2016) https://doi.org/10.1117/12.2234760
KEYWORDS: Photomasks, Lithography, Photoresist materials, Modulation, Photoresist processing, Integrated optics, Semiconducting wafers, Molybdenum, Finite element methods, Silicon

Showing 5 of 7 publications
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