Dr. Enio L. Carpi Profile

Dr. Enio L. Carpi

Applications Manager at Toppan Photomasks Inc

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Publications (2)

Proceedings Article | 5 November 2005 Paper

Photomask registration specification and its impact on FLASH memory devices

Enio Carpi, Stuart Brown, Florence Tan, Rick Edwards

Proceedings Volume 5992, 59921K (2005) https://doi.org/10.1117/12.632354

KEYWORDS: Reticles, Scanners, Photomasks, Data modeling, Overlay metrology, Lithography, Process control, Data analysis, Neural networks, Error analysis

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Proceedings Article | 19 July 2000 Paper

Investigation of fast and accurate reticle defect assessment methods using STARlight for chrome-on-glass reticle defects

Ingrid Peterson, Kaustuve Bhattacharyya, Enio Carpi, Darius Brown, Martin Verbeek, Douglas Bernard

Proceedings Volume 4066, (2000) https://doi.org/10.1117/12.392033

KEYWORDS: Reticles, Semiconducting wafers, Image transmission, Contamination, Scanning electron microscopy, Photomasks, Calibration, Inspection, Printing, Cadmium sulfide

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