Dr. Enrico Serra
at CNR-IMEM Trento
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Internet, Resonators, Remote sensing, Silicon, 3D modeling, Sensor networks, Laser Doppler velocimetry, Finite element methods, Fusion energy

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Mirrors, Oscillators, Silicon, Coating, Optical coatings, Reflectivity, Microfabrication, Computer aided design, Semiconducting wafers, Cryogenics

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Actuators, Solar energy, Resonators, Electrodes, Energy harvesting, Modal analysis, Finite element methods, Distributed computing, Chemical elements

Proceedings Article | 17 May 2013 Paper
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Electronics, Microsystems, Resonators, Silicon, Energy harvesting, Modal analysis, Finite element methods, Electromagnetism, Instrument modeling

Proceedings Article | 17 May 2013 Paper
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Mirrors, Oscillators, Resonators, Silicon, Coating, Optical coatings, Reflectivity, Radiation effects, Semiconducting wafers, Cryogenics

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