Dr. Enrique Iborra
at Univ Politécnica de Madrid
SPIE Involvement:
Conference Program Committee | Author
Publications (5)

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Resonators, Silicon, Biosensors, Atomic force microscopy, Latex, Aluminum nitride, Zinc oxide, Liquids

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Silica, Etching, Sputter deposition, Silicon, Oxygen, Silicon films, Surface micromachining, Absorption

PROCEEDINGS ARTICLE | April 21, 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Avalanche photodetectors, Capacitors, Resonators, Sensors, Electrodes, Dielectrics, Photodiodes, Laser interferometry, Bridges, Aluminum nitride

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Polishing, Etching, Sputter deposition, Particles, Germanium, Silicon, Oxygen, Aluminum nitride, Chemical mechanical planarization

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Optical lithography, Electrodes, Silicon, 3D modeling, Finite element methods, Bridges, Aluminum nitride, Molybdenum

Conference Committee Involvement (5)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
Smart Sensors, Actuators and MEMS
4 May 2009 | Dresden, Germany
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