Dr. Eran Amit
at KLA-Tencor Israel
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Target detection, Semiconductors, Optical filters, Metrology, Detection and tracking algorithms, Calibration, Inspection, Scanning electron microscopy, Precision measurement, Overlay metrology

SPIE Journal Paper | December 2, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Metrology, Overlay metrology, Calibration, Optical filters, Etching, Semiconducting wafers, Detection and tracking algorithms, Polishing, Chemical vapor deposition, Chemical mechanical planarization

PROCEEDINGS ARTICLE | April 21, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Optical filters, Polishing, Metrology, Detection and tracking algorithms, Calibration, Etching, Computer simulations, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization

PROCEEDINGS ARTICLE | April 21, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Lithography, Optical filters, Metrology, Calibration, Inspection, Quality measurement, Microelectronics, Analytical research, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Optical filters, Metrology, Data modeling, Calibration, Ions, Time metrology, Process control, Neodymium, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Target detection, Semiconductors, Lithography, Metrology, Calibration, Error analysis, Manufacturing, Semiconducting wafers, Yield improvement, Overlay metrology

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top