Eri Makimura
Product Marketing Engineer at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 16, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Optical lithography, Contamination, Defect detection, Scanners, Coating, Inspection, Wafer inspection, Thin film coatings, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Lithium, Optical lithography, Radon, Manufacturing, Inspection, Process control, Software development, Manufacturing equipment, Semiconducting wafers

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