Eric Acome
PhD Student at Univ of Colorado Boulder
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Photomasks, Mirrors, Microscopes, Extreme ultraviolet, Fiber optic illuminators, Lenses, Reflectivity, Charge-coupled devices, Coating, Extreme ultraviolet lithography

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