Dr. Eric Cotte
Research & Development Engineer at GlobalFoundries
SPIE Involvement:
Publications (30)

Proceedings Article | 19 March 2015 Paper
Tetyana Shapoval, Bernd Schulz, Tal Itzkovich, Sean Durran, Ronny Haupt, Agostino Cangiano, Barak Bringoltz, Matthias Ruhm, Eric Cotte, Rolf Seltmann, Tino Hertzsch, Eitan Hajaj, Carsten Hartig, Boris Efraty, Daniel Fischer
Proceedings Volume 9424, 94240B (2015) https://doi.org/10.1117/12.2085788
KEYWORDS: Optical filters, Overlay metrology, Semiconducting wafers, Data modeling, Metrology, Optical properties, Optical simulations, Signal processing, Etching, Image segmentation

Proceedings Article | 17 October 2014 Paper
Matthias Ruhm, Bernd Schulz, Eric Cotte, Rolf Seltmann, Tino Hertzsch
Proceedings Volume 9231, 92310O (2014) https://doi.org/10.1117/12.2068206
KEYWORDS: Overlay metrology, Etching, Semiconducting wafers, Lithography, Distortion, Metrology, Photomasks, Semiconductor manufacturing, Control systems, Plasma etching

Proceedings Article | 1 October 2013 Paper
Eric Cotte, Hariharasudhan Kathiresan, Matthias Ruhm, Bernd Schulz, Uwe Schulze
Proceedings Volume 8886, 888608 (2013) https://doi.org/10.1117/12.2030186
KEYWORDS: Overlay metrology, Scanners, Metrology, Semiconducting wafers, Process control, Time metrology, Lithography, Manufacturing, Pollution control, Photomasks

Proceedings Article | 2 April 2011 Paper
Proceedings Volume 7985, 798507 (2011) https://doi.org/10.1117/12.885690
KEYWORDS: Reticles, Semiconducting wafers, Scanners, Overlay metrology, Thermal effects, Manufacturing, Lithography, Wafer-level optics, Image processing, Process control

Proceedings Article | 23 September 2009 Paper
Proceedings Volume 7488, 74880N (2009) https://doi.org/10.1117/12.834302
KEYWORDS: Photomasks, Critical dimension metrology, Signal to noise ratio, Principal component analysis, Process control, Image registration, Electron beam melting, Error analysis, Lithography, Tolerancing

Showing 5 of 30 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top