Dr. Eric M. Gullikson
Staff Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Conference Program Committee | Author
Publications (136)

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10397, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XX
KEYWORDS: Reflectors, Mirrors, Rockets, Astronomy, Polarization, Spectroscopy, X-rays, Imaging spectroscopy, Polarimetry, X-ray astronomy

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: Reflectors, Mirrors, Rockets, Modulation, Polarization, Spectroscopy, X-rays, X-ray sources, Phase shift keying, Polarimetry

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Reflectors, Statistical analysis, Data modeling, Silicon, Reflectivity, Surface roughness, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Molybdenum, Electromagnetic theory, Scanning tunneling microscopy

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction, Etching, X-rays, X-ray diffraction, Wet etching, Plasma etching, Extreme ultraviolet lithography, Monochromators, Direct write lithography, Diffraction gratings

PROCEEDINGS ARTICLE | May 10, 2016
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Microscopes, Multilayers, Optical lithography, Etching, Chromium, Printing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Phase shifts

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Mirrors, Ions, Plasmas, Solids, Extreme ultraviolet, Terbium, Extreme ultraviolet lithography, Picosecond phenomena, Gadolinium, Pulsed laser operation

Showing 5 of 136 publications
Conference Committee Involvement (2)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
Advances in Computational Methods for X-Ray and Neutron Optics
3 August 2004 | Denver, Colorado, United States
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