Dr. Eric M. Gullikson
Staff Scientist at Lawrence Berkeley Lab
SPIE Involvement:
Author
Publications (155)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530B (2024) https://doi.org/10.1117/12.3014229
KEYWORDS: Optical properties, Extreme ultraviolet, Modeling, Scattering, Databases, Synchrotrons, Refraction, Photoresist materials, Pellicles, Extreme ultraviolet lithography

Proceedings Article | 5 October 2023 Presentation + Paper
Proceedings Volume 12679, 126790L (2023) https://doi.org/10.1117/12.2676797
KEYWORDS: Diffraction gratings, Blazed gratings, X-rays, Semiconducting wafers, Diffraction, Silicon, Spectroscopy, Etching

Proceedings Article | 4 October 2023 Presentation
Proceedings Volume PC12694, PC1269407 (2023) https://doi.org/10.1117/12.2678573
KEYWORDS: Blazed gratings, Diffraction gratings, Optical gratings, Plasma etching, Etching, Silicon, Polymers, Plasma, X-rays, X-ray diffraction

Proceedings Article | 3 October 2023 Presentation + Paper
Proceedings Volume 12694, 1269404 (2023) https://doi.org/10.1117/12.2692397
KEYWORDS: Iron, Magnetism, Extreme ultraviolet, Calibration, Spectral calibration, Gold, High harmonic generation, X-rays

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume PC12494, PC1249408 (2023) https://doi.org/10.1117/12.2662135
KEYWORDS: Extreme ultraviolet, Reflectometry, Phase measurement, Photomasks, Metrology, Reflectance spectroscopy, Spectroscopy, Scatterometry, Plasma, Phase shifts