Dr. Eric M. Gullikson
Staff Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Conference Program Committee | Author
Publications (136)

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10397, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XX
KEYWORDS: X-rays, Polarimetry, Rockets, Mirrors, Polarization, Imaging spectroscopy, X-ray astronomy, Spectroscopy, Astronomy, Reflectors

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: X-rays, Polarimetry, Mirrors, Polarization, Rockets, Reflectors, Spectroscopy, Modulation, X-ray sources, Phase shift keying

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Data modeling, Photomasks, Reflectivity, Extreme ultraviolet, Optical proximity correction, Monte Carlo methods, Extreme ultraviolet lithography, Reflectors, Statistical analysis, Electromagnetic theory, Surface roughness, Silicon, Molybdenum, Scanning tunneling microscopy

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction gratings, Diffraction, X-rays, X-ray diffraction, Etching, Extreme ultraviolet lithography, Monochromators, Plasma etching, Wet etching, Direct write lithography

PROCEEDINGS ARTICLE | May 10, 2016
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Photomasks, Phase shifts, Optical lithography, Extreme ultraviolet, Printing, Chromium, Extreme ultraviolet lithography, Etching, Multilayers, Microscopes

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Plasmas, Gadolinium, Ions, Mirrors, Pulsed laser operation, Terbium, Extreme ultraviolet, Extreme ultraviolet lithography, Solids, Picosecond phenomena

Showing 5 of 136 publications
Conference Committee Involvement (2)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
Advances in Computational Methods for X-Ray and Neutron Optics
3 August 2004 | Denver, Colorado, United States
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