Dr. Eric M. Gullikson
Staff Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Conference Program Committee | Author
Publications (138)

Proceedings Article | 6 July 2018
Proc. SPIE. 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
KEYWORDS: Diffraction, Optical design, Spectroscopy, X-rays, Silicon, Charge-coupled devices, Optical alignment, X-ray technology, Diffraction gratings

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Optical components, Electron beam lithography, Optical design, Reflection, Silicon, Atomic layer deposition, Extreme ultraviolet, Molybdenum, Structural engineering, Phase shifts

Proceedings Article | 29 August 2017
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: Reflectors, Mirrors, Rockets, Modulation, Polarization, Spectroscopy, X-rays, X-ray sources, Phase shift keying, Polarimetry

Proceedings Article | 29 August 2017
Proc. SPIE. 10397, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XX
KEYWORDS: Reflectors, Mirrors, Rockets, Astronomy, Polarization, Spectroscopy, X-rays, Imaging spectroscopy, Polarimetry, X-ray astronomy

Proceedings Article | 27 March 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Reflectors, Statistical analysis, Data modeling, Silicon, Reflectivity, Surface roughness, Monte Carlo methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Molybdenum, Electromagnetic theory, Scanning tunneling microscopy

Proceedings Article | 15 September 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction, Etching, X-rays, X-ray diffraction, Wet etching, Plasma etching, Extreme ultraviolet lithography, Monochromators, Direct write lithography, Diffraction gratings

Showing 5 of 138 publications
Conference Committee Involvement (2)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
Advances in Computational Methods for X-Ray and Neutron Optics
3 August 2004 | Denver, Colorado, United States
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